In this paper, The brand new lapping slurry and sprucing slurry are released. And also the deliquescence degree of CLBO is fallen to cheapest. A new Doing work technological know-how can also be adopted. Immediately after tough sprucing, the focus of ultra-precision polishing slurry is improved adequately. So does the extremely-precision sprucing velocity, plus the wiping velocity is quicker when compared to the deliquescence speed. The CLBO crystal area roughness can realize 1nm and maintain the floor high-quality perfectly. Obtain as a result of your establishment

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The typical electricity on the NIR laser even now has the likely to get improved to tens of watts like 70 W [26] In case the double-pass configuration could be used to the Yb:YAG SCF amplifier stage. For this reason, In the event the conversion performance of 31% from NIR to DUV could possibly be continue to managed at this larger electric power situation, the common output ability in the DUV laser at 258 nm can be greater than 20 W, which might be a remarkable ability degree for your DUV laser and result in the unanticipated DUV laser machining outcomes. Moreover, for high-power DUV laser, the UV harm of your nonlinear crystal, such as the windows for CLBO crystal as well as the mirrors, is an additional critical parameter for long-lasting and stable Procedure.

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Due to thermal lens result inside the strong-point out lasers, If your heating management is insufficient, It's not at all straightforward to get the sound-point out laser using a superior electrical power in addition to a large beam high-quality simultaneously. Just lately, with the event of The skinny disk laser and solitary-crystal fiber (SCF) laser, a superior-electrical power laser at the basic wavelength (one μm) had been realized with a fantastic beam quality Despite a TEM00 method beam [four,24], which might be superior candidates for the fundamental in the DUV laser technology. A further candidate for the fundamental is the higher-energy fiber laser which might be achieved by coherent beam mix with M2 price below 1.

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While in the scientific and industrial programs, the beam quality on the DUV laser can be a crucial parameter. Significantly, the beam high quality with the DUV laser drastically has an effect on the laser machining outcomes. The beam excellent from the DUV laser is set by that of the elemental laser as well as crystal for that frequency conversion. Lately, a superior-electricity DUV laser (>ten W) at 258 nm was documented which has a beam good quality of M2 < one.five, which was created by FHG of a Yb:YAG laser at 1030 nm using the CLBO crystal [13]. This laser would cause a greater laser machining consequence in comparison to the prior DUV lasers with greater M2.

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The beam profile shown in Determine 7b shown a good beam excellent as one of several deserves of Raman laser, which would be effective to make a 193-nm DUV laser with a top quality beam.

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The development on the 193-nm laser was shown by stages of SFG. In an effort to scale the DUV laser power efficiently, a different concept in the 193-nm DUV laser era is introduced dependant on the diamond Raman laser.